Electron beam heating devices



Fais. 55 w52 M. BASCHE 5TM. 3,020,387

ELECTRON BEAM HEATING DEVICES Filed June 3, x15359 l0 Sheets-Sheet 2 FIG.

FIG 2 ATTORNEYS @il 5, 3952 M. BASCHE Emu. 3,020,357 ELECTRON BEAM HEATING DEVICES Filed June IL, 1959 l@ Sheets-Sheet 3 ATTORNEYS Fe, 6, M2

ELECTRON BEAM HEATING DEVICES Filed June 3,1959 lO Sheets-Sheet 4 FIG. 5

M. BASCHE ETAL 3,926,387? x Fein. M EASCHE ETAL Bz? ELECTRON BEAM HEATING DEVICES 4 Filed June 5,-1959 1o miens-sheet s ATTORNEYS reb. S, i952 M. BASCHE ETAL 3,926,387

ELECTRON BEAM HEATING DEVCES Filed June a3, 1959 10 Sheets-Sheet 6- L i /l34 M ATTO RNEYS Teil 1%? M. BASCHE HAL 3,929,3@7

ELECTRON BEAM HEATING DEVICES Filed June 3*, 1959 l0 Sheds-Sheet 7 Requio'of -w D C Oulfpui' ATTORNEYS M. BSCHE Feb. S, w62

l0 Sheets-Sheet 8 Filed June 3.* 1959 INVENTORS 09m-UMS. I i?. WMV-Cim ATTORNEYS Feb. f6, i662 M. BASCHE ETAL ELECTRON BEAM HEATING DEVICES 10 Sheets-Sheet 9 Filed June 3, 1959 IN V EN TOR-9 Byfn. 2"@

Wou-qv @eil ATTORNEYS FiG.

Feb, i962 M. SASCHE ETAL 3,026,381

ELECTRON BEAM HEATNG DEVICES Filed June 5, 1959 l0 Sheets-Sheet 10 JN V EN T ORS 71M Hymn www ma@ Alva j y. ffm-wf j. m i y ATTORNEYS 3,629,337 ELECTRN BEAM HEATENG Malcolm Rasche, Newionville, ivai'hias F. aComerord,

Watertown, Nicholas Doyle, r., Brookline, and

.lames S. Hetherington, Boston, Mass., assignors, hy

mesne assignments, to Alloyd Electronics Corporation,

Cambridge, Mass., a corporation of Delaware Filed .inne 3, i959, Ser. No. 817,812 9 craters. (ci. 2te-so) The present invention relates to heating by electron bombardment and, more particularly, to a versatile dcvice for effecting such electron bombardment techniques as zone refining, welding., drip melting, annealing. etc. Such heating techniques possess advantages over conventional heating techniques in that they protect the work from contamination by maintaining a high vacuum and permit theV temperature to be precisely controlled oy electrically determining the'electron beam energy transmitted. Generally, such a device comprises: a hermetic enu closure which is continuously evacuated to low pressure in such a way that any vapors emitted oy the work are withdrawn from the enclosure as soon as generated; a low potential source from which electrons are -emitted in order to generate heat in the work toward which they are directed; a holder for positioning the work within the enclosure; and a power supply for generating an electro static field between the source and the work.

The present invention reiatesto such an electron beam heating device comprising a plurality of associated components which are designed for detachable connection to the hermetic enclosure in order to perform a variety of electron beam heating functions in versatile fashion. More particularly, the hermetic enclosure is provided with a plurality of normally closed ports and a plurality of modules for performing various operations within the enclosure. The construction is so designed that any Selected module may be mated with any selected portin a manner which provides unprecedented versatility. Thus, for example, an electron gunv module operatively connected within the enclosure and a work holder module operatively connected to one of the ports may be selectively associated as desired to perform electron welding or zone refining.

Other objects of the present invention will in part be obvious and will in part appear hereinafter.

For a fuller understanding of the nature and objects of the present invention, reference should be had to the following detailed disclosure taken in connection with the accompanying drawings wherein:

FIG. 1 is a perspective view of a device embodying the present invention;

FIG. 2 is a side elevation of the device of FIG. l;

FIG. 3 is a front elevation of the device of FIG. l;

FIG. 4 is a cross-sectional View of the device of FIG. 1, taken substantially along the lines 4 4;

FIG. 5 is a cross-sectional view of the device of FIG. 1, taken substantially along the lines 5-5of FIG. 4, showing an association of modules for performing a zone refining process;

FIG. 6 is a cross-sectional view of the device of FIG. l, analagous to the cross-sectional view of FIG. 5, showing an association of modules for performing a drip melting process;

FIG. 7 is a perspective view of an electron gun embodying the present invention;

FIG. 8 is a cross-sectional view of the electron gun of FIG. 6, the section being taken substantially along the line 8-8;

FIG. 9 illustrates the electrical system of the device of FG. l, partly in block diagram and partly in mechanicaldetlil;`

. "fI a assess? rarest-sa e, tesa FiG. 10 is a cross-sectional -riew of the device of FIG. l, in association with modules for eectingan automatic welding process;

FIG. il is a broken-away perspective view of the device of FIG. l, in association with modules for edecting an annealing process; and

FIG. l2 is a cross-sectional view of the device of FIG. l, analagous to the view of FG. 4, in association with modules for determining 'nigh temperature creep'.

Generally, each or' .he illustrated embodiments of the present invention comprises a table at which an operator may be seated, a hermetic enclosure providing a plurality of ports through and a plurality of mounts in the enclosure, a plurality of modules for association with the ports and mounts in order to perform various operations, and a power supply providing terminals und leads for connection within the enclosure to the modules. Normally, one of the modules provides a holder for positioning work within the enclosure and another provides an electron gun for directing a beam of electrons toward the work. The modules are designed for interchangeability in such a way that only a few modules need be provided in order to perform a variety of electron beam heating processes. i.e. zone refining, welding, drip melting, high temperature creep studies, cathode etching, annealing and various combinations thereof. During operation of the device, the hermetic enclosure is continuously evacuated by a mechanical ore pump and a oil diffusion pump, which cooperate to maintain the pressure within the hermetic enclosure at an extremely low value, preferably less than 0.0i micron of mercury, notwithstanding any gaseous discharges from the work. The mounts within the hermetic enclosure are provided with certain alternative like mechanical connections to which corresponding reciprocal like mechanical connections on one or more or" the modules may be mated. The ports through the hermetic enclosure are provided with certain alternative like connections to which corresponding reciprocal ylike mechanical connections on one or more of the modules may be mated. The connections provided by the ports and the reciprocal connections provided 'oy the modules are provided with seals -which render the interconnections hermetic. The hermetic enclosure is provided with a plurality of alternative electrical connections by which modules so mated are provided with power.

FIGS. l, 2, 3 and 4 show a hermetic enclosure 20, in accordance with the present invention, mounted upon a table 22 at which an operator may be seated and inassociation with which are located cabinets enclosing components of the system to be described below. As shown table 22 includes at opposite sides a pair of cabinets 24 and 26, within which theA electrical and the control systems are enclosed` Table 20 includes a horizontal panel 28 upon which evacuated enclosure 20 is supported. Enclosure 20 is provided by a generally cylindrical casing 3U, at the rearward end of which is an outwardly convex closure 33. Closure 32 has a port 34, the outward edge of which is provided with a iiange 36. Flange 36 is disposed in a plane perpendicular to the axis of port 34. Closure 33 is provided with a port 38 the axis of which is disposed at an angle to the axis of cylindrical casing 30. Port 38 is provided with a flange 40 having a depression 42 that receives a sight glass 44. Sight glass 44, which is clamped in position by a ring 46, for example, is composed of X-ray-opaque but light-transparent lead glass that shields the operator from any X-radiation. Closure 33 is pivotally connected to casing 30 by a suitable 'ninge 4S.

At intervals around the circumferencev of casing 36 are four ports 50, 52, Se and 56, all of which have aeaaser nanges S8 that present coupling areas of like conformation and provide bores of like diameter and relative location. These flanges are intended to be mated with reciprocal llanges of the various modules to be described below. Alternatively, these flanges are mated with reciprocal caps 59 that present coupling areas of like conformation and that provide bores of like diameter and relative location. Any tiange of the ports and any tlange selected from either the reciprocal anges of the modules or corresponding areas of the reciprocal caps may be coupled with an tit-ring therebetween, by threaded nuts and bolts 61. The O-ring which is composed of a suitable elastomer, for example, a rubber-like material, renders the inter-connection hermetic.

Communicating with chamber 30 through ports 34 are a mechanical fore pump 6l) and a mercury diffusion pump 62. These pumps cooperate continuously to maintain the interior of casing 30 at an extremely low pressure when the device is in operation. As is best shown in FIG. 4, ahixed to the interior of enclosure 2li are four pairs of dogs, each pair having one dog at the forward edge and the other at the rearward edge of casing 30. One dog of each pair is visible in FIG. 3 at e4, 6d, d8 and 70. Dog 66 is broken awayto show the dog 7l behind it. As shown each dog provides a horizontal face 72 and vertical face 74. Also provided are a vertical internally threaded bore 76 communicating with horizontal face 72 and a horizontal internally threaded bore 7S communieating with vertical face 64. Five insulated connectors 80 project through cap 52 and four insulated connectors 82 project radially through enclosure 20. These connectors providepower from a suitable supply to modules mounted on the various dogs and the various tlanges of enclosure 20 in a manner to be described below.

In FIG. 5, enclosure 2li is disclosed in association with a pair of modules for eecting the zone refinement of an elongated metal rod 84. lt is known that various impurities in an elongated metal rod may be removed by generating a floating zone of molten metal in the rod and moving the oating zone along throughout rod. The liquied zone has the ability to absorb impurities from alijacent solid zones and to retain them as it moves along the rod. As stated above, work B4 is in the form of a metal rod of the foregoing type to be purified. Rod 84 is mounted for vertical longitudinal movement by a mounting module 83 through an electron gun module S8. Mounting module 36 includes a sleeve 90 that is aligned with upper port 52 and that is provided with a ange 92. Flange 92 is mated with tiange 58 by suitable bolts 94, which extend through openings in flanges 92 and 58. A suitable O-ring 96 is provided between iianges 92. and 58 for the purpose of hermeticallysealing sleeve 92 to port 52. Extending downwardly through sleeve 9d is the hollow shaft 98, the upper and lower ends of which are sealed as at 100 and 102 to inwardly projecting iianges ot' sleeve 90. Extending through holow shaft 98 is a helical screw 104, the upper end of which is driven through a suitable gearbox 106 by a motor 1163. An internally threaded rider 110, moves along screw 104 as it rotates. Rider 11i) is operatively connected to an inner sleeve 112, from the lower end of which projects a stub shaft 114. Stub shaft is aiixed to a coupling 116. Extending downwardly from coupling 116 is a bow 113, between the arms of which work 84 is disposed. A pair of guides 126 and 122, which are supported on appropriate dogs, prevent bow 118 from rotating as stub shaft 114 advances. Thus, when motor 108 operates, work 84 advances through electron gun 88, which is now to be described.

Electron gun 88 is encased within a disk shaped housing 12S. it includes a heated tilament 124 which emits electrons thermionically, an accelerating mesh 126 that is at a higher potential than filament 124 in order to accelerate the electrons emitted therefrom, a. focusing disk arrangement 128 for directing the beam toward the vertical artis of the gun and an annular shield 136 medially provided with a slip 132 ror limiting access of the electron beam to a narrow region of the work. The various elements are spaced from each other by suitable insulators `In FIG. 6, there is shown the hermetic enclosure of FIG. l in association with a pair of modules for edecting a drip melting process therewithin. Drip melting pro vides a purification technique characterized by melting the work to produce droplets which are received in such a way that purified and solidified work material is built up in a cooling region. The modules here include: an advance feed module 136, which is identical to its counterpart in FIG. 4; a heating module 137 which is identical to its counterpart in FIG. 4; a heat exchange module 140,

which is supported in the same way as heating module.

137; and a retract feed module 139, which is identical to advance feed module 136. Heat exchange module includes a heater 141 for maintaining a liquid pool in that portion ot the newly gathering work material which has not been cooled, and a cooler 143 for solidifying successive strata of the pool. Modules 136, 137 and 140 -are carried by the hermetic enclosure in the manner described above. As stated above the mechanical components of modules 136 and 139 are identical, thc difierence between these modules being primarily merely their orientation. Heat exchange module 149 is supported on available dogs and is provided with a lluid coolant through flexible hoses 152.

As is shown in FIG. 9, the insu-lated electrical connectors and S2 of FIGS supply power from a supply of the type shown in the block diagram. This power supply includes an alternating current input 154 and a series of current regulated power outputs 156, 158, and 162. in the rorrn shown, connectors 80 are designated a, b, c, d and e and connectors 82 are designated f, g, fz. 1'. By way of example, the various terminals are capable or' the following outputs; a to b, 0 5() v. and 0-50 A: b to c, O-5O v. and 0-50 A; d to e, 0-50 kv. and O-750 ma.: f to g, Ol2 ltv. and O-l A; and lz to t', 0-5 kv, and 0-l A; in an exemplary hookup of the system of FIG. 5. terminals ii, f, b and c are connected together, terminal i is connected to the accelerator of the elect-ron gun, terminals a and c are connected across the filament of the electron gun and terminal d is connected to the repeller ot' the electron gun and terminal gis grounded.

FIG, l0 discloses the hermeticxenclosure of FIG. i in combination with a pair of modules 164- and 166 that cooperate automatically to insert and withdraw work to be welded within the hermetic enclosure. Each of mod ulcs 164 and 166 includes a linear actuator 168 which is similar to its counterpart in FIG. 3. an interchange chamber 174i into which work may be placed and from which work may be removed before and after it is subjected to electron bombardment within hermetic chamber 30, and a suitable interchange valve 171 which serves to seal its associated interchange chamber, while it is opened. from the vacuum chamber. Interchange chamber 176 has a lid 173 which may be opened to permit the insertion of work into the interchange chamber and onto a holder. After the work has been so positioned, lid 173 is hermetically closed and chamber 17@ is evacuated. rl'lhereafter, interchange valve 171 is opened to permit work holder to be directed uponsuitable guides 177 through interchange valve 171 into position within the vacuum chamber. Within the vacuum chamber is an electron gun module 179 of the type described above at 88. y

In FIG. l1 there is disclosed illustrative fragments of modules 171, 172, 176 and 173 for bright annealing metal foils in vacuum at moderately high temperature. Module 171 is mounted on dogs of the type described above and includes a supply spool 174 and a. take up spool 175 for the foil 176 to be worked. Module 172 includes a motor that is connected to one of the portsot sondes? 5 the hermetic chamber in order to drive a chain and sprocket system 178 that advances the foil from a supply spool E74 to take up spool 175. Module 3.73 includes an electron gun 179 inthe form of a filament surrounding the foil in order to emit electrons toward theroil substantially in a given plane. Module i71 is mounted within the hermetic enclosure on available dogs. Modules 172 andv i735 are mountedon the flanges of available ports for operation therethrough.

in FIG. 12 is disclosed. a module E86 for indicating high temperature creep without destroying or altering-the composition of the work undergoing the test. This module may be bolted within the hermetic chamber and comprises: a support i234 from which the work lilo depends; a heating coil 19d about the work; and a weight 2G@ afiixed to the other end of the work. A pointer 202. in conjunction with a scale l204 indicates the creep under the conditions of the experiment.

Since certain changes may be made in the above apparatus without departing from the scope of the invention herein involved, it is intended that all matter contained in the above description or shown in the accompanying drawings shall be interpreted in an illustrative and not a limiting sense.

What is claimed is:

l. An electron beam heating device comprising a hermetic enclosure having a plurality of ports at different positions therethrough and a plurality or' mounts at differ ent positions therein, means for continuously evacuating said enclosure, each of said ports having a first connecting means, each of said mounts having a second connecting means, and a plurality of modules, at least rst of Said modules having a third connecting means, at least a second of said modules having a fourth connecting means,

any one of said third connecting means and any one of said first connecting means being adapted for mating, any one of said fourth connecting means and any one or' said second connecting means being adapted for mating, one of said :nodules providing an electron beam source, one of said modules providing a holder `for positioning Work in association with said electron beam source, whereby said electron beam source and said holder may be located at selected ones of said different positions.

2. The electron beam heating device of claim i, wherein at least one of said modules provides a drive means for moving said holder.

3. The electron beam heating device of claim i, wherein at least one or" said modules includes a heat exchange means having a heating unit and a cooling unit.

4. The electron heating device of claim l, wherein said electrton bearn source is provided with terminals through which it is energized, and wherein electricm terminals are provided within said enclosure and detachable jump ers are connected to said terminals of said electron beam source and of said enclosure.

5. The electron beam heating device oiclaim l, wher@ in said electron beam source is carried by said first of said modules.

6. The electron beam heating device of claim l, wherein said electron beam source is carried by said second of said modules.

7. The electron beam heating device of claim l, where in one of said modules supports said work at one end thereof and a Weight is connected to said work at the other end thereof, and another of said modules provides an indicator for determining the elongation of said work.

S, An electrton beam heating device comprising a hermetic enclosure having a' plurality of ports therethrough, rneans for continuously evacuating said enclo` sure, said ports providing like rst connecting means, a plurality of modules providing like second connecting means, any one of said rst: connecting means and any one of said second connecting means being adapted for mating, an electron beam source mounted within one of said enclosure and said modules, and a holder mounted one of said enclosure and said modules for positioning work in association with said electron beam source.

9. An electron bearn heating device comprising a hermetio enclosure having at at least two ports at diieren positions therethrough, each ot' said ports having a rs connecting means or' rst predetermined configuration, at least a module having a second connecting means of second predetermined configuration, said second connecting means being mated with one of said rst connecting means so that said irst conguration and said second configuration thereof are hermetically sealed to each other, at least one cap having a third connecting means of said second coniiguration, said third connecting means being mated with another of said first connecting means so that said rst configuration of said other of said first connecting means; and said second conguration of said third connnecting means are hermeticaily sealed to each other, an electron beam source being mounted in one of said enclosure and said module, and a work holder being mounted in the other of said enclosure and said rnodule, whereby said electron beam source and said Work holder may be located at selected ones oi said different posi tions.

References Cited in the tile of this patent UNITED STATES PATENTS Great Britain Feb. 29, i956 

